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Proximal probe-like nano structuring in metal-assisted etching of silicon

Bahçeci, Ersin; Enders, Brian; Yamani, Zain Hassan; Tokmoldin, Serekbol; Taukenov, Aman; Abuhassan, Laila; Nayfeh, Munir (American Institute of Physics Inc., 2019)

We use silicon having multiple crystalline orientation domains and high metal doping in metal assisted chemical etching (MACEtch) in HF/H2O2. In device-quality silicon, MACEtch produces high-aspect ratio anisotropic (1-D) ...