dc.contributor.author | Uyanık, Zemzem | |
dc.contributor.author | Türkoğlu, Fulya | |
dc.contributor.author | Köseoğlu, Hasan | |
dc.contributor.author | Ekmekçioğlu, Merve | |
dc.contributor.author | Ata, Bengü | |
dc.contributor.author | Demirhan, Yasemin | |
dc.contributor.author | Özdemir, Mehtap | |
dc.contributor.author | Aygün, Gülnur | |
dc.contributor.author | Özyüzer, Lütfi | |
dc.date.accessioned | 2022-12-02T06:33:38Z | |
dc.date.available | 2022-12-02T06:33:38Z | |
dc.date.issued | 2022 | en_US |
dc.identifier.citation | Uyanik, Z., Turkoglu, F., Koseoglu, H., Ekmekcioglu, M., Ata, B., Demirhan, Y., Ozdemir, M., Aygun,
G., Ozyuzer, L. (2022). Enhanced optoelectronic properties of magnetron sputtered ITO/Ag/ITO multilayers by
electro-annealing. Journal of Vacuum Science and Technology B, 40 (4), art. no. 042204.
https://doi.org/10.1116/6.0001868 | en_US |
dc.identifier.uri | https://doi.org/10.1116/6.0001868 | |
dc.identifier.uri | https://hdl.handle.net/20.500.12508/2374 | |
dc.description.abstract | Indium tin oxide/silver/indium tin oxide (ITO/Ag/ITO) multilayers have attracted much attention to fulfill the growing need for high-performance transparent conducting oxide electrodes. To make these transparent multilayers work better, electro-annealing, which is a method of self-heating by electric current, can be effective. Moreover, the effect of current on ITO/Ag/ITO multilayers should be investigated to make sure that electronic devices will be reliable over their lifetime. In this study, ITO/Ag/ITO multilayer electrodes with varying Ag thicknesses were grown by DC magnetron sputtering at room temperature. Structural, optical, and electrical properties of these multilayers were investigated before and after electro-annealing. Measurement results revealed that improved optical transmittance and sheet resistance can be obtained by the optimization of Ag thickness for the as-grown ITO/Ag/ITO layers. The highest figure of merit (FoM) value of 17.37 × 10-3 ω-1 with optical transmittance of 85.15% in the visible region and sheet resistance of 11.54 ω/□ was obtained for the Ag thickness of 16.5 nm for as-grown samples. The electro-annealing of as-grown ITO/Ag/ITO multilayers led to improved optical behavior of the multilayer structure over a wide spectral range, especially in the near-infrared range. Electro-annealing also provided an improvement in the crystallinity and sheet resistance of the electrodes. The improvement of the electrical and optical properties of the structure enabled a FoM of 23.07 × 10-3 ω-1 with the optical transmittance of 86.80% in the visible region and sheet resistance of 10.52 ω/□. The findings of this work provide proper knowledge of the properties of ITO/Ag/ITO multilayers under electrical current and suggest that the overall performance of the multilayers can be improved by the electro-annealing process. | en_US |
dc.language.iso | eng | en_US |
dc.publisher | AVS Science and Technology Society | en_US |
dc.relation.isversionof | 10.1116/6.0001868 | en_US |
dc.rights | info:eu-repo/semantics/closedAccess | en_US |
dc.subject.classification | Zinc Oxide | |
dc.subject.classification | Sheet Resistance | |
dc.subject.classification | Transparent Electrodes | |
dc.subject.classification | Engineering | |
dc.subject.classification | Science & Technology - Other Topics | |
dc.subject.classification | Physics | |
dc.subject.other | ITO thin-films | |
dc.subject.other | High-performance | |
dc.subject.other | Optical-properties | |
dc.subject.other | Transparent | |
dc.subject.other | Temperature | |
dc.subject.other | Deposition | |
dc.subject.other | Layer | |
dc.subject.other | Crystallinity | |
dc.subject.other | Indium compounds | |
dc.subject.other | Infrared devices | |
dc.subject.other | Magnetron sputtering | |
dc.subject.other | Opacity | |
dc.subject.other | Optical multilayers | |
dc.subject.other | Sheet resistance | |
dc.subject.other | Silver | |
dc.subject.other | Tin oxides | |
dc.subject.other | Transparency | |
dc.subject.other | Transparent conducting oxides | |
dc.subject.other | Transparent electrodes | |
dc.subject.other | 'current | |
dc.subject.other | Ag thickness | |
dc.subject.other | As-grown | |
dc.subject.other | Electronics devices | |
dc.subject.other | Indium tin oxides (ITO) | |
dc.subject.other | Optoelectronics property | |
dc.subject.other | Performance | |
dc.subject.other | Self-heating | |
dc.subject.other | Transparent conducting oxide electrodes | |
dc.subject.other | Visible region | |
dc.subject.other | Annealing | |
dc.title | Enhanced optoelectronic properties of magnetron sputtered ITO/Ag/ITO multilayers by electro-annealing | en_US |
dc.type | article | en_US |
dc.relation.journal | Journal of Vacuum Science and Technology B | en_US |
dc.contributor.department | Mühendislik ve Doğa Bilimleri Fakültesi -- Metalurji ve Malzeme Mühendisliği Bölümü | en_US |
dc.relation.publicationcategory | Makale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı | en_US |
dc.contributor.isteauthor | Türkoğlu, Fulya | |
dc.contributor.isteauthor | Köseoğlu, Hasan | |
dc.relation.index | Web of Science - Scopus | en_US |
dc.relation.index | Web of Science Core Collection - Science Citation Index Expanded | |