dc.contributor.author | Bahçeci, Ersin | |
dc.contributor.author | Enders, Brian | |
dc.contributor.author | Yamani, Zain Hassan | |
dc.contributor.author | Tokmoldin, Serekbol | |
dc.contributor.author | Taukenov, Aman | |
dc.contributor.author | Abuhassan, Laila | |
dc.contributor.author | Nayfeh, Munir | |
dc.date.accessioned | 2019-07-04T13:16:51Z | |
dc.date.available | 2019-07-04T13:16:51Z | |
dc.date.issued | 2019 | en_US |
dc.identifier.citation | Bahceci, E., Enders, B., Yamani, Z., Tokmoldin, S., Taukenov, A., Abuhassan, L., Nayfeh, M. (2019). Proximal Probe-like Nano Structuring in Metal-assisted Etching of Silicon. AIP Advances. 9(5), 055228.
https://doi.org/10.1063/1.5096659 | en_US |
dc.identifier.uri | https://doi.org/10.1063/1.5096659 | |
dc.identifier.uri | https://hdl.handle.net/20.500.12508/400 | |
dc.description.abstract | We use silicon having multiple crystalline orientation domains and high metal doping in metal assisted chemical etching (MACEtch) in HF/H2O2. In device-quality silicon, MACEtch produces high-aspect ratio anisotropic (1-D) structures (wires, columns, pores or holes) and to a lesser degree non-high-aspect ratio luminescent (0-D) nano structures. While the 1-D structure symmetry is understood in terms of crystallography axis-dependent etching, predominantly along the <100> direction, the isotropic 0-D spherical symmetry etching is not understood. We observe in silicon having multiple crystalline orientation domains formation of metal tips (needles or whiskers) of diameters as small as 2-3 nm that bridge the metal to silicon and cause AFM/STM-like nanofabrication, producing 0-D mounds, indentations, or clusters. The formation of sharp needles can be understood in terms of charge injection/electric breakdown between metal clusters and silicon due to charge build-up. Silicon with high degree of impurities as well as with multiple crystalline orientation domains allow imaging these effects using electron spectroscopy without cross sectional cuts. | en_US |
dc.language.iso | eng | en_US |
dc.publisher | American Institute of Physics Inc. | en_US |
dc.relation.isversionof | 10.1063/1.5096659 | en_US |
dc.rights | info:eu-repo/semantics/openAccess | en_US |
dc.subject.classification | Nanowires | Silicon solar cells | SiNW arrays | en_US |
dc.subject.classification | Nanoscience & Nanotechnology | en_US |
dc.subject.classification | Materials Science | en_US |
dc.subject.classification | Multidisciplinary | en_US |
dc.subject.classification | Physics | en_US |
dc.subject.classification | Applied | en_US |
dc.subject.other | Aspect ratio | en_US |
dc.subject.other | Crystalline materials | en_US |
dc.subject.other | Electron spectroscopy | en_US |
dc.subject.other | Metals | en_US |
dc.subject.other | Nanostructures | en_US |
dc.subject.other | Needles | en_US |
dc.subject.other | Silicon | en_US |
dc.subject.other | 1-d structures | en_US |
dc.subject.other | Crystalline orientations | en_US |
dc.subject.other | High aspect ratio | en_US |
dc.subject.other | Metal assisted etchings | en_US |
dc.subject.other | Metal-assisted chemical etching | en_US |
dc.subject.other | Nano-structuring | en_US |
dc.subject.other | Proximal probes | en_US |
dc.subject.other | Spherical symmetry | en_US |
dc.subject.other | Spherical symmetry | en_US |
dc.subject.other | Etching | en_US |
dc.subject.other | Engineering | en_US |
dc.subject.other | Performance | en_US |
dc.subject.other | Fabrication | en_US |
dc.title | Proximal probe-like nano structuring in metal-assisted etching of silicon | en_US |
dc.type | article | en_US |
dc.relation.journal | AIP Advances | en_US |
dc.contributor.department | Mühendislik ve Doğa Bilimleri Fakültesi -- Metalurji ve Malzeme Mühendisliği Bölümü | en_US |
dc.contributor.authorID | 0000-0002-7719-6051 | en_US |
dc.contributor.authorID | 0000-0002-5284-4040 | en_US |
dc.contributor.authorID | 0000-0002-6031-9385 | en_US |
dc.contributor.authorID | 0000-0003-0633-4733 | en_US |
dc.contributor.authorID | 0000-0002-1459-4976 | en_US |
dc.identifier.volume | 9 | en_US |
dc.identifier.issue | 5 | en_US |
dc.identifier.startpage | 055228-1 | en_US |
dc.identifier.endpage | 055228-7 | en_US |
dc.relation.publicationcategory | Makale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı | en_US |
dc.contributor.isteauthor | Bahçeci, Ersin | |
dc.relation.index | Web of Science - Scopus | en_US |
dc.relation.index | Web of Science Core Collection - Science Citation Index Expanded | en_US |